Tanaka K, Mochida Y, Sugimoto M et al (1995) A micromachined vibrating gyroscope. Pai P, Chowdhury FK, Mastrangelo CH et al (2012) MEMS-based hemispherical resonator gyroscopes Sensors, 2012 IEEE. Maenaka K et al (2006) Novel solid micro-gyroscope Micro Electro Mechanical Systems, MEMS 2006, Istanbul, pp 634–637 A theoretical analysis on the proposed gyroscope is performed using the one-dimensional equations for piezoelectric beams with the inclusion of the effect.
The gyroscope operates with flexural vibration modes in perpendicular directions. Maekawa K, Tanaka Y, Fujita T, Maenaka K (2010) Proposal of 2-axis bulk-PZT gyroscope. We propose a new piezoelectric vibratory gyroscope made of a ceramic tube poled in the thickness direction. Liu K, Zhang W, Chen W et al (2009) The development of micro-gyroscope technology. In ad-dition, a trapped-energy vibratory gyroscope on a PZT ce-ramic plate of 25 × 25mm2 area and 1.7mm. In: The fifteenth IEEE international conference on IEEE micro electro mechanical systems, pp 718–721 A new trapped-energy vibratory gyroscope with three elec-trodes, which uses the thickness-shear vibrations in a piezo-electric ceramic plate with a plano-mesa structure, was pro-posed, and its principle of constitution was presented. He G, Najafi K (2002) A single-crystal silicon vibrating ring gyroscope. Hao Z, Pourkamali S, Ayazi F (2004) VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators-part I: design and modeling. In: transducers and eurosensors XXVII: the 17th international conference on solid-state sensors, actuators and microsystems (TRANSDUCERS and EUROSENSORS XXVII). Electron Lett 49(6):406–407Ĭho J, Woo JK, Yan J et al (2013) A high-Q birdbath resonator gyroscope (BRG). J Microelectromech Syst 10(2):169–179Ĭheng YX, Zhang WP et al (2013) MEMS-based piezoelectric BAW resonator based on out-of-plane degenerate mode for micro angular detector. J Microelectromech Syst 9(3):288–294Īyazi F, Najafi K (2001) A HARPSS polysilicon vibrating ring gyroscope. Three accelerometers are equipped in the piezoelectric gyroscope to measure the angular velocity of three directions. Ayazi F, Najafi K (2000) High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology.
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